FAHCS-6AL high-performance thermal Mass Flow Controller (MFC)

This is a high-performance thermal Mass Flow Controller (MFC) designed for precise measurement and control of gas flow. It integrates a thermal flow sensor and a proportional control valve in a stainless steel flow body. With a maximum working pressure of 3 MPa, it delivers accurate and stable gas flow control for industrial and analytical applications.

  • Description
  • Specifications
  • Size

The MFC measures gas flow via the thermal dispersion principle and automatically adjusts the integrated control valve to maintain the desired flow rate. The D-sub electrical interface supports standard analog (0–5 V / 4–20 mA) or digital (RS485/Modbus) communication for easy system integration. The stainless steel flow block and threaded connections ensure reliable performance at high pressure.

  • Thermal mass flow measurement principle
  • Integrated proportional control valve
  • Maximum working pressure: 3 MPa
  • Stainless steel flow body for corrosion resistance
  • D-sub electrical interface (analog / digital options)
  • High accuracy and fast response
  • NIST-traceable calibration (optional)
  • Multiple gas types selectable